| 摘要 |
PURPOSE:To provide a method, which can prevent generation of a conveying error due to deviation of the position of a substrate between a storing carrier and a device and can surely convey the substrate. CONSTITUTION:Position detecting sensors 25, 26 for an object to be conveyed are arranged in a carrier 2 and a robot arm 12 so as to detect the position of the object, and the position information is delivered to a control device 27 so that a deviating quantity of the position is found, and then, a correcting quantity corresponding to the deviating quantity of the position is sent to a robot 11 and a work stage 14 so that transfer and adjustment are carried out. In this way, a conveying error in a substrate having large dispersion of an outline dimension is eliminated and a yield is improve, while a size in a conveying system or a device can be reduced by means of a simple system. |
