| 摘要 |
<p>PURPOSE:To provide a positioning mechanism, which has simple structure and is excellent in maintainability and economics, for a notched wafer. CONSTITUTION:A wafer 10 is supported by a stopper 40 and a driving roller 30 (a), and a notch 20 is moved in the arrow Q direction according to the rotation of the driving roller 30 (b), and then, the notch 20 is engaged with a stopper 40, and at the same time, the wafer 10 is supported by a guide roller 50 and the stopper 40 and is stopped (C).</p> |
