VAPOR PHASE GROWTH OF COMPOUND SEMICONDUCTOR FILM,申请号JP19930072404-传众专利搜索

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发明名称	VAPOR PHASE GROWTH OF COMPOUND SEMICONDUCTOR FILM
摘要
申请公布号	JPH06283447(A)	申请公布日期	1994.10.07
申请号	JP19930072404	申请日期	1993.03.30
申请人	JAPAN ENERGY CORP	发明人	IKEDA EIJI
分类号	C30B25/10;H01L21/205;H01L21/324;(IPC1-7):H01L21/205	主分类号	C30B25/10
代理机构		代理人
主权项
地址

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