| 摘要 |
PURPOSE:To obtain a thin film magnetic material having stable magnetic characteristics and an excellent performance by scattering specific nonmagnetic micro cluster areas in an amorphous magnetic area composed of magnetic atoms. CONSTITUTION:This magnetic material contains a first component composed of at least one kind of magnetic atoms selected from among Co, Fe, and Ni, second component composed of at least one kind of nonmagnetic atoms selected from among Nb, Ta, and V, and third component composed of nonmagnetic Zr atoms. At the time of forming the magnetic material, an amorphous area 2 is formed of the magnetic atoms of the first component and micro cluster areas 1 are formed of the atoms of the second and third components so that the areas 1 can be scattered in the area 2. Therefore, various kinds of micro magnetic devices having high degrees of integration and complicated shapes can be obtained, because the magnetic stability against temperatures of this thin film magnetic material and, accordingly, the machining stresses and degree of freedom in design of magnetic circuit elements can be improved.
|
