发明名称 |
PRODUCTION OF THREE-DIMENSIONAL CIRCUIT BOARD |
摘要 |
<p>PURPOSE:To form circuits with high-density wirings on the three-dimensional circuit board having large ruggedness differences. CONSTITUTION:The three-dimensional circuit board is produced by including a stage for applying a photoresist 3 on the front surface of the three-dimensional circuit board 1 molded of a resin, superposing a photomask 4 thereon and exposing the photoresist with collimated beams of light, then developing the photoresist. The exposing is executed by using the photomask 4 formed with light transmission parts 4a subjected to the size adjustment meeting the spread of the collimated beams of light according to the spacing between the photomask 4 and the circuit forming surface of the circuit board 1 at this time. The process is so constituted that the exposure can be made by correcting the spread of the collimated beams of light by the spacing between the circuit board 1 and the photomask 4, by which the nonuniformity in the width size of the circuit 6 occurring in the ruggedness on the surface of the circuit board 1 is averted.</p> |
申请公布号 |
JPH06282062(A) |
申请公布日期 |
1994.10.07 |
申请号 |
JP19930144049 |
申请日期 |
1993.06.15 |
申请人 |
MATSUSHITA ELECTRIC WORKS LTD |
发明人 |
NAKAJIMA KUNJI;SUZUKI TOSHIYUKI;NAKAMOTO ATSUHIRO;TEZUKA YOSHITAKA;OOTANI RIYUUJI |
分类号 |
G03F1/00;G03F7/20;H05K3/00;H05K3/18;H05K3/24;(IPC1-7):G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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