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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06283597(A)
申请公布日期
1994.10.07
申请号
JP19930067193
申请日期
1993.03.26
申请人
TOSHIBA CORP;TOSHIBA MICRO ELECTRON KK
发明人
MATSUMI KOICHI
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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