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发明名称
WASHER
摘要
申请公布号
JPH06283491(A)
申请公布日期
1994.10.07
申请号
JP19930092156
申请日期
1993.03.26
申请人
SONY CORP
发明人
INAGAKI YASUSHI
分类号
B01D12/00;B08B3/08;H01L21/304;(IPC1-7):H01L21/304
主分类号
B01D12/00
代理机构
代理人
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