| 摘要 |
PURPOSE:To prevent the leakage of electrode cooling water and air into a vacuum case, reduce the number of sealing points, and simplify the assembly with respect to a three-axis-orthogonal gas laser oscillator. CONSTITUTION:A pair of metal electrodes 1 and 3 are secured on the inner surface of a vacuum case 5 with an insulating block 19 and 21, respectively, in-between. An O-ring 31 and 33 is placed between the vacuum case 5 and the insulating blocks 19 and 21 and between the insulating blocks 19 and 21 and the metal electrodes 1 and 3 to maintain hermeticity. Openings 23, 25, 27 and 29 which expose the metal electrodes 1 and 3 to the open air are formed in the insulating blocks 19 and 21 and the vacuum case 5 inside the O-rings 31 and 33. A water path for cooling the metal electrodes 1 and 3 and wiring to a power supply are formed at these openings. |
