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发明名称
WAFER WASHER
摘要
申请公布号
JPH06283487(A)
申请公布日期
1994.10.07
申请号
JP19930071615
申请日期
1993.03.30
申请人
SUMITOMO METAL IND LTD
发明人
TAMAYA IZUMI
分类号
H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/304
主分类号
H01L21/302
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代理人
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