| 摘要 |
<p>PURPOSE: To provide a reference standard for the test of an optical scanner, and in particular, for establishing the particle counting of the scanner. CONSTITUTION: This equipment is a patterned wafer for testing an optical scanner. The wafer has light scattering characteristics 11, 31, 33, 35, 37, 47, 57 of standard dimension like pits of aligned groups arranged in annular belts around the center 13 of concentric circles. Empty annular belts 17 isolate the characteristics containing the annular belts. The empty belts simulate wafer edges 51, 55, 59, for various kinds of wafers. In this mode, the wafer edge may be excluded in the particle counting of a wafer of previously determined dimension. Distinct dimension change of a lot of scanning shows mis-alignment about the scanning center.</p> |
