| 摘要 |
The invention relates to a standard for sampling or calibrating apparatuses such as near-field microscopes, especially atomic-force microscopes, electron microscopes, optical microscopes, interferometers or the like which are used as imaging or metrology tools for observing and characterising microstructures or nanostructures, especially for studying the surface topographies. The standard according to the invention consists of a polymeric structure or the replica of this structure, which is in the form of a regular succession of levels (1) forming steps, the said levels having, in cross-section, the shape of at least one staircase. Application: study of surface topographies. <IMAGE> |
