FORMING METAL THIN FILM,申请号JP19930071914-传众专利搜索

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发明名称	FORMING METAL THIN FILM
摘要
申请公布号	JPH06283446(A)	申请公布日期	1994.10.07
申请号	JP19930071914	申请日期	1993.03.30
申请人	KAWASAKI STEEL CORP	发明人	YAMAMOTO HIROSHI;KONDO HIDEKAZU;TAKEYASU NOBUYUKI;KATAGIRI TOMOHARU;OOTA TOMOHIRO
分类号	H01L21/205;H01L21/3205;H01L23/52;(IPC1-7):H01L21/205;H01L21/320	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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