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发明名称
ELECTRON BEAM EXPOSURE SYSTEM
摘要
申请公布号
JPH06283408(A)
申请公布日期
1994.10.07
申请号
JP19930066383
申请日期
1993.03.25
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
NAGATA AKIRA
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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