Herstellungsverfahren für Schaltgitter eines Ionen-Mobilitäts-Spektrometers und nach dem Verfahren hergestellte Schaltgitter

摘要

A planar gating grid for an IMS spectrometer is constructed with two sets of comb-like grid elements. Each set is connected to an electrode and the sets are interdigitated to form the grid. Mechanical stability is provided by attaching the grid elements to an insulating support member. The gating grid is produced from a thin metal foil by cutting or etching the foil to produce a rigid grid structure where all of the elements are connected to both electrodes and the electrodes are separated by a stretcher member. After the rigid grid structure is affixed to the insulating support member, the grid elements are selectively severed from one of the two electrodes to form the interdigitated grid.