The decomposition of NF3 in NF3-containing exhaust gases (off-gases) is described. The NF3 is decomposed at temperatures between 230 DEG C and 600 DEG C over Al2O3 or SiO2 as the sole decomposition agent. Activated Al2O3 is particularly highly suitable.
申请公布号
DE4311061(A1)
申请公布日期
1994.10.06
申请号
DE19934311061
申请日期
1993.04.03
申请人
SOLVAY FLUOR UND DERIVATE GMBH, 30173 HANNOVER, DE
