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发明名称
Verfahren zum Herstellen von elektrischen Kontakten in integrierten Schaltungen.
摘要
申请公布号
DE3888511(T2)
申请公布日期
1994.10.06
申请号
DE19883888511T
申请日期
1988.11.28
申请人
N.V. PHILIPS' GLOEILAMPENFABRIEKEN, EINDHOVEN, NL
发明人
DE WERDT, REINIER C/O PHILIPS INTERNATIONAL B.V., NL-5656 AA EINDHOVEN, NL;DE BRUIN, LEENDERT C/O PHILIPS INTERNATIONAL B.V., NL-5656 AA EINDHOVEN, NL
分类号
H01L21/3205;H01L21/768;(IPC1-7):H01L21/60;H01L21/90
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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