| 摘要 |
PURPOSE:To elevate the detection accuracy and the reliability in the qualitative analysis of a trace of elements contained by a method wherein the intensity of characteristic X ray of a sample is measured to identify an element with the highest peak in a wavelength profile and then, judgement is made on the presence of peak in the intensity data of higher order rays obtained sequentially. CONSTITUTION:The highest peak PA1 in the wavelength profile of a characteristic X rays of a sample point analyzed with an EPMA1 is detected with a peak detector section 12 of a qualitative analyzer 2 to identify an element A. In this profile which indicates the intensity of the primary ray of the element A, the intensity data PA2-PA4 of higher order rays are calculated with an arithmetic processing section 14 from the ratio of intensity PA1 of the primary ray and the intensity data of the element A is subtracted from the waveform profile to determine the intensity data PB1-PB5 of identified elements B. This operation is repeated until no peak exists in the remaining profiles PC1-PC4. This prevents the overlapping of peaks in two elements to eliminate misrecognition of peak thereby improving the accuracy of the qualitative analysis free from the presence of a trace element. |
