| 摘要 |
PURPOSE:To enhance space resolving power without increasing the number of the channels of an X-ray detector, by constituting the titled apparatus so that an X-ray tube and an X-ray detector are arranged in opposed relation to each other and set so as to be relatively and freely movable by an arbitrary distance. CONSTITUTION:An X-ray tube 1 and an X-ray detector 2 are arranged to hold an object 3 to be inspected therebetween and a large number of semiconductive detection elements 2a are arranged to said detector 2 at an interval (channel interval) (d). The X-ray tube 1 and the detector 2 are provided on the same plane so as to be rotated around the object 3 to be inspected as shown by an arrow (p) and fanwise X-rays 7 are allowed to irradiate from the X-ray tube 1 to perform first scanning. Next, the X-ray tube 1 is moved left or right by the arbitrary distance within the range of the element interval (d) of the detection elements 2a, for example, (1/4)Xd as shown by (q) and, thereafter, scanning is again performed. Because the X-ray tube is moved by the arbitrary distance within the range of the interval of the detection elements, a sampling point is increased without increasing the number of channels of the X-ray detector and space resolving power can be enhanced. |
