| 发明名称 |
Wear-resistant transparent dielectric coatings. |
| 摘要 |
A substantially transparent wear-resistant member wherein a dielectric layer is coated on a support such as glass. Wear-resistance is enhanced by reducing fine-scale surface roughness of the dielectric layer. <IMAGE> |
| 申请公布号 |
EP0566271(A3) |
申请公布日期 |
1994.10.05 |
| 申请号 |
EP19930302413 |
申请日期 |
1993.03.29 |
| 申请人 |
DEPOSITION SCIENCES, INC. |
发明人 |
SHEVLIN, CRAIG |
| 分类号 |
C23C14/06;C03C17/22;C03C17/23;C03C17/34;C23C16/30;C23C30/00;G02B1/00;G02B1/10;H01L21/3105 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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