| 摘要 |
PURPOSE:To enhance adhesive strength of a glass layer with tungsten and polysilicon layers therebeneath and prevent tungsten from being oxidized at the time of firing the glass, by providing a thin film of an oxide such as silicon oxide and alumina before providing an abrasion-resistant glass layer on a substrate provided with a heating resistor layer and a conductor layer. CONSTITUTION:The resistance between tungsten layers sandwiching therebetween the part of a polysilicon layer 5 functioning as a heating resistor is checked (5), and then a thin oxide film is provided on the substrate in a thickness of 300-1,000Angstrom . In case the oxide is silicon oxide, the layer thereof is provided by CVD, while in case of alumina the oxide layer is provided by sputtering (6). A mixture of lead borate glass (PbO-SiO2-B2O3) with small amounts of alumina (Al2O3) and potassium oxide (K2O) is powdered, the resultant powder is mixed with a solvent to prepare a glass paste, which is applied by printing (7) to the part requiring an abrasion-resistant layer 7 in the vicinity of the heating resistor, followed by drying. The glass layer thus provided is fired in air (8) to obtain the desired abrasion-resistant layer. |
