Apparatus and method for high-efficiency, in-situ particle detection.

摘要

The present invention relates generally to a new apparatus and a method for a high-efficiency in-situ vacuum particle detection. More particularly, the invention encompasses an apparatus for a particle detecting instrument designed to detect the presence of gas-borne particles in a vacuum line with high efficiency, using a sharply converging nozzle (10) to preferentially aerodynamic focus the suspended particles flowing through it into a small region (26) located on the nozzle axis within a few exit dimensions downstream from the nozzle exit. This focal region has a dimension much smaller than that of the nozzle exit, and is illuminated by a narrow, intense light beam. The particles passing through the illuminated focal region are detected by photodetector elements (19) receiving light scattered from the particles. A method and an apparatus (50) for high-efficiency in-situ particle separation and/or measurement is also disclosed.