摘要 |
PURPOSE:To obtain a fluoroalkoxy silane used as a raw material for producing silicon dioxide, semiconductor-processing materials, optical fiber materials, etc., by reacting an alkoxysilane with a fluorosilane. CONSTITUTION:The characteristic of the method for producing a fluoroalkoxysilane by introducing an alkoxysilane and a fluorosilane into a reactio'ystem is reacting the alkoxysilane with the fluorosilan in the presence of a catalyst comprising one or more kinds of the oxides of the group V or VI elements in the periodic table. |