Linear motor suspension system

摘要

Power requirements for a robotic system are achieved through the employment of modular-type linear motor (LM) cells of either the one dimensional or two-dimensional type. Increasing system power requirements are met through the utilization of an increasing number of modular linear motor cells precisely positioned upon a common mounting plate to assure proper operation with a common platen. Deviations in the planarity or flatness of the platen and/or linear motor confronting surfaces due, for example, to warpage, temperature fluctuations, machining considerations or the like, are accommodated by mounting each modular LM cell upon a solid suspension member having mounting legs which are machined or otherwise formed from the solid member so as to be compliant in the Z direction only and non-compliant in the mutually perpendicular X and Y directions thereby allowing for movement in the Z direction as well as rotational movement about the X or Y axes to compensate for warpage or non-planarity of the platen and/or linear motor. Each mounting leg has a boss which is provided to enable the compliant legs to undergo proper flexing due to the displacement of the adjacent mounting surface of the LM, provided for by the bosses.