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经营范围
发明名称
PRODUCTION OF CRYSTAL THIN FILM
摘要
申请公布号
JPH06279180(A)
申请公布日期
1994.10.04
申请号
JP19930066786
申请日期
1993.03.25
申请人
MITSUBISHI KASEI CORP
发明人
WATABE YUKIO
分类号
C01G1/00;C01G3/00;C23C14/28;C30B23/06;C30B23/08;H01B12/06;(IPC1-7):C30B23/08
主分类号
C01G1/00
代理机构
代理人
主权项
地址
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