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经营范围
发明名称
ELECTRONIC DEVICE
摘要
申请公布号
JPH06275679(A)
申请公布日期
1994.09.30
申请号
JP19930061889
申请日期
1993.03.22
申请人
HITACHI LTD
发明人
SATO TOSHIHIKO;HAYASHIDA TETSUYA
分类号
H01L21/60;H01L23/36;(IPC1-7):H01L21/60
主分类号
H01L21/60
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代理人
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