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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH06275395(A)
申请公布日期
1994.09.30
申请号
JP19930060154
申请日期
1993.03.19
申请人
SUMITOMO METAL IND LTD
发明人
ONO KATSUYUKI;MIYAMOTO TAKASHI;KITSUKI TAKAO
分类号
C23F4/00;H01L21/027;H01L21/30;H01L21/302;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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