| 摘要 |
PURPOSE:To enable precision detection of relative position in a short time by amplifying, with the amplification factor corresponding to scanning position, the signal corresponding to the reflection light from multiple alignment marks, at the second scanning, and detecting relative position of multiple allignment marks, according to the signal obtained. CONSTITUTION:Amplification factor S15 that makes signal level, corresponding to positions S12 of multiple alignment marks (a) and (b) among signal S10 obtained by the first scanning, approximately constant, is obtained by calculation means 12 and 13. This is stored in a storage means 14 according to the position of alignment marks (a) and (b). Further, variable gain amplification means 4 and 5, where the signal S10 obtained at the second scanning is, according to the scanning position S12, amplified by amplification factor S16 stored in the storage means 14, are provided. Then, according to the signal S10 amplified by the variable gain amplification means 4 and 5, the relative positions of multiple alignment marks a and b are detected by a position detection means 13. |
