REMOVAL DEVICE OF TRACE AMOUNT OF WATER CONTENT IN HELIUM GAS

摘要

PURPOSE:To provide a removal device which can remove a trace of moisture in helium gas and deal with the removal even when the varies into many different systems, and facilitate the maintenance of a filter. CONSTITUTION:When separating and removing a trace amount of water content in an ice crystal state produced by cooling helium gas by means of a filter 2, the filter 2 is laid out in a liquid nitrogen vessel 1. Especially, a plurality of filters, which are attached to each of helium gas systems, are placed into one liquid nitrogen vessel.