Device for controlling flows originating from cells for evaporating solid materials, employing valves servo-controlled by measurements of partial pressures

摘要

For controlling the flow originating from at least one cell (2) for evaporating a solid material, including a crucible (6) containing the material and provided with an opening (18) for the exit of this material, and a controllable valve (14) for modifying this opening, the device includes means (22) for measuring the partial pressure of the vapour of the material, which produce a signal representative of this pressure, means (24) for adjusting the valve, and means (26) for controlling the latter means in order to vary the flow in a predetermined manner as a function of the signal produced. Application to the manufacture of thin layers of semiconductive materials.