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发明名称
PLASMA GENERATION METHOD AND DEVICE AND PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH06275397(A)
申请公布日期
1994.09.30
申请号
JP19930085734
申请日期
1993.03.20
申请人
TOKYO ELECTRON LTD
发明人
KOIKE YUKIO
分类号
C23C16/50;H01L21/302;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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