| 摘要 |
<p>PURPOSE:To provide an electrostatic chuck in which peeling of adhered parts of a susceptor and an insulating film or a resistor layer and the film due to change in thermal expansions or contractions of the susceptor and the layer can be suppressed. CONSTITUTION:An electrostatic chuck for attracting to hold an element 2 to be attracted at a mount surface of a susceptor 10 by an electrostatic force comprises a resistor layer 31 as a mount surface for attracting to mount the element 2 to be attracted, and an insulating film 20 arranged between the layer 31 and the susceptor 10, wherein an adhered part 21 of the film 20 to the layer 31 is formed to be asymmetrical to an adhered part 22 of the film 20 to the susceptor 10.</p> |
