| 摘要 |
<p>PURPOSE:To wash the edge of a square substrate properly with a solvent, at the same time collect the solvent and a dissolved substance properly without any scattering, and further improve durability of the collection configuration. CONSTITUTION:A square substrate 1 where a thin film is formed on a surface is placed and retained by a substrate retention means and then first and second solvent discharge means 21a and 21b for dissolving an unneeded thin film by discharging a solvent to the edge of the square substrate 1 and a suction member 20 for sucking and unloading the solvent and a dissolved substance are provided. On the other hand, a second solvent discharge means 24b for discharging the solvent and dissolving the unneeded thin film is provided at the rear surface side, the suction member 20 and a drain tank 23 are connected via a first exhaust pipe 25, a support attitude modification means 24, and a second exhaust pipe 26, and then the first and second solvent discharge means 21a and 21b are moved linearly along the edge of the square substrate 1 while changing the support direction of the second exhaust pipe 26 following the move, thus dissolving and eliminating the unneeded thin film of the edge of the square substrate 1.</p> |
