| 摘要 |
<p>PURPOSE:To provide the process for production of the color filter which improves production efficiency by completely removing the residue of the coloring resin remaining in a photolithography stage. CONSTITUTION:This process consists of producing the color filter by applying the coloring resin formed by dispersing at least a coloring material into a transparent photosensitive resin on a substrate 1 and heating the resin to temporally cure the resin, then subjecting the resin to exposing and developing in the photolithographing stage then to reheating to normally cure the resin and to form one color and successively forming other colors by the similar stages. The residue 5 of the photosensitive resin are decomposed by implanting ozone 8 simultaneously with or before the irradiation with UV rays 6 to the parts corresponding to packaging terminals for packaging at least the electrodes on the color filter substrate to circuits, such as IC, before or after the heat treatment including the temporary curing to remove the residual components after the formation of the color filter.</p> |
