SPEED CONTROL DEVICE FOR STAGE

摘要

PURPOSE:To provide a stage speed control device capable of quickly detecting the generation of abnormality in a feed screw or the like for a stage device. CONSTITUTION:The stage speed control device is provided with a computer 7 for detecting output voltage VOUT impressed from a servo amplifier 2 and comparing the voltage VOUT with the regulated voltage decided on the basis of voltage corresponding to the maximum output current value of a power amplifier. The computer 7 detects the voltage VOUT plural times at a prescribed interval during the movement of the stage 1, and when the voltage VOUT exceeds regulated voltage, judges the generation of any abnormality in the stage 1.