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发明名称
FORMATION OF METALLIC FILM
摘要
申请公布号
JPH06275536(A)
申请公布日期
1994.09.30
申请号
JP19930061786
申请日期
1993.03.22
申请人
SUMITOMO METAL IND LTD
发明人
FUKUI KATSUICHI
分类号
H01L21/205;H01L21/285;H01L21/768;(IPC1-7):H01L21/205;H01L21/90
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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