| 摘要 |
PURPOSE:To make the intensity of a beam uniform in a direction along a discharge direction by applying an electric field having a line of magnetic force in a direction nearly parallel to the discharge direction of an electrode generating an electric discharge exciting a laser. CONSTITUTION:An electrode 1 and an electrode 2 are arranged and installed inside a laser chamber, the cathode electrode 1 is attached and bonded to an insulating material 3, and the anode electrode 2 is arranged and installed so as to face the electrode 1. In addition, the cathode electrode 1 is connected to a high-voltage circuit by a cathode wire 4, and the anode electrode 2 is connected to a ground by an anode return wire 5. Then, while charged particles generated by an electric discharge are being moved along a line of electric force by a Coulomb force due to an electric field applied across the electrode 1 and the electrode 2, they form an excitation region provided with laser activity, and they excite a laser. Consequently, since a magnetic field is applied so as to be parallel to the electric field, the uniformity of the intensity of a beam in a direction along a discharge direction can be enhanced. |
