| 摘要 |
PURPOSE:To perform high quality and high accurate solid surface treatment through the selection and utilization of a cluster size by making a cluster beam pass the opening parts of plural opening electrodes to apply voltage to these electrodes to mass-separate a cluster. CONSTITUTION:Gas gaseous at normal temperature such as CO2 or fluoride or chloride is led into a gas source 2 through a lead-in port 1 until on the tip of the gas source 2. At that time, a cluster composed of several hundres atoms is formed by adiabatic expansion, and this cluster passes a skimmer 4 to be led to an ionization part 5. Part of the cluster is ionized when the cluster passes the ionization part 5 to become a cluster ion, and it is accelerated by acceleration voltage applied to an acceleration electrode 6 and a base plate holder 7 to collide with a base plate 8. At that time, a cluster having specific size is extracted by a mass separating means such as an energy analyzer/ acceleration electrode system 60 at the time of ionization to be utilized. |
