| 摘要 |
PURPOSE:To provide a discharge excited gas laser device wherein the constitution of a discharge part is simple, a main discharge is generated stably and the laser can be oscillated with good efficiency. CONSTITUTION:A dielectric 3 is arranged along the side of a second main electrode 6, a first preliminary ionization electrode 1 is installed along the surface of the dielectric 3, a second preliminary ionization electrode 2 is installed at the outer side with reference to the main electrode than the first preliminary ionization electrode 1 along the surface of the dielectric 3 in the same manner, a voltage is applied across the first preliminary ionization electrode 1 and the second preliminary ionization electrode 2, a creeping discharge 4 is generated on the surface of the dielectric, and a preliminary ionization in a main discharge space is performed by ultraviolet rays generated from there. Consequently, a preliminary ionization source 8 does not disturb a gas flow, and 3 discharge part can be constituted simply. In addition, since impurities produced by a main discharge can be removed sufficiently, the main discharge can be generated stably and uniformly even in a highly repeated operation. |
