| 摘要 |
PURPOSE:To provide a post-curing device, which introduces intact high- temperature substrates immediately after a resin-sealing process ends therein without using a magazine and is capable of performing a post-curing treatment on the substrates, dispenses with a preheating process and is capable of contriving the improvement of productivity. CONSTITUTION:A post-curing device is provided with a substrate transfer means, such as a conveyor 15, which transfers substrates P made to go through a resin-sealing process one sheet by one sheet in a heating chamber 11 provided with a means to circulate hot air of a prescribed temperature from the entrance of the chamber 11 toward the exit of the-chamber 11. |
