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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06275728(A)
申请公布日期
1994.09.30
申请号
JP19930081076
申请日期
1993.03.17
申请人
CANON INC
发明人
GOFUKU IHACHIROU
分类号
H01L21/265;H01L21/28;H01L21/768;H01L23/522;(IPC1-7):H01L21/90
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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