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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06275723(A)
申请公布日期
1994.09.30
申请号
JP19930089305
申请日期
1993.03.23
申请人
SANYO ELECTRIC CO LTD
发明人
ICHIHASHI YOSHINARI
分类号
H01L21/304;H01L21/3205;H01L21/768;(IPC1-7):H01L21/90;H01L21/320
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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