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经营范围
发明名称
METHOD OF FORMING FILM
摘要
申请公布号
JPH06275608(A)
申请公布日期
1994.09.30
申请号
JP19930084052
申请日期
1993.03.18
申请人
TOKYO ELECTRON LTD
发明人
IMAI MASAYUKI;NISHIMURA TOSHIHARU
分类号
H01L21/31;C23C16/44;C23C16/458;H01L21/316;H01L21/318;(IPC1-7):H01L21/316
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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