发明名称 |
Method for evaporation coating of a layer |
摘要 |
For a roller-type (paper) capacitor, it is intended to evaporation-coat a layer (4) having two regions (21, 22) of different layer thickness onto to a substrate. According to the invention, for this purpose, in order to produce the region (21) of reduced layer thickness, this region is covered, before the evaporation-coating, with an oil layer which evaporates during evaporation-coating of the layer and has a thickness such that the coating process in the region of the coating window is delayed to a greater or lesser extent, depending on the desired layer thickness, after the evaporation of the oil layer takes place. <IMAGE>
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申请公布号 |
DE4309717(A1) |
申请公布日期 |
1994.09.29 |
申请号 |
DE19934309717 |
申请日期 |
1993.03.25 |
申请人 |
LEYBOLD AG, 63450 HANAU, DE |
发明人 |
FISCHER, REINHARD, DR.-ING., 63303 DREIEICH, DE;KLEYER, SIEGFRIED, 63512 HAINBURG, DE |
分类号 |
C23C14/02;C23C14/04;C23C14/56;H01G13/06;(IPC1-7):C23C14/20 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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