发明名称 METHODS OF REMOVING AND DETECTING HARMFUL COMPONENT
摘要 Methods of removing and detecting harmful components selected from the group consisting of volatile inorganic hydrides, volatile inorganic halides and organometallic compounds, and apparatus therefor. The harmful components are removed by contacting the same with copper hydroxide (24) or are detected by observing the discoloration of the hydroxide (24).
申请公布号 WO9421355(A1) 申请公布日期 1994.09.29
申请号 WO1994JP00431 申请日期 1994.03.17
申请人 NIPPON SANSO CORPORATION;SUGIMORI, YOSHIAKI;WATANABE, TADAHURU;KIKUCHI, HITOSHI;ENDO, FUMITAKA;ICHIMURA, SHINJI;YOSHIDA, MEGUMI;IMAI, HIROAKI 发明人 SUGIMORI, YOSHIAKI;WATANABE, TADAHURU;KIKUCHI, HITOSHI;ENDO, FUMITAKA;ICHIMURA, SHINJI;YOSHIDA, MEGUMI;IMAI, HIROAKI
分类号 A62D3/00;A62D3/33;A62D101/24;A62D101/43;A62D101/49;B01D53/46;B01D53/68;(IPC1-7):B01D53/34;G01N31/22;G01N31/00 主分类号 A62D3/00
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