发明名称 Semiconductor storage cell and method for forming the same
摘要 The invention discloses a semiconductor storage cell and a method for forming the same. A capacitor is arranged under a transistor such that the DRAM cell is suitable for high-density semiconductor devices. The semiconductor device according to the present invention comprises: a buried capacitor which consists of a storage electrode, a dielectric layer and a plate electrode, and which is formed on a substrate in planar form; and a transistor which is formed over the capacitor, the source/drain region of the transistor being connected to the storage electrode of the capacitor.
申请公布号 DE4407532(A1) 申请公布日期 1994.09.29
申请号 DE19944407532 申请日期 1994.03.07
申请人 GOLD STAR ELECTRON CO., LTD., CHUNGCHEONGBUK, KR 发明人 CHOI, JONG MOO, CHUNGCHEONGBUK, KR
分类号 H01L27/10;H01L21/8242;H01L27/108;H01L27/12;(IPC1-7):H01L27/108;H01L21/72 主分类号 H01L27/10
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