发明名称 |
Semiconductor storage cell and method for forming the same |
摘要 |
The invention discloses a semiconductor storage cell and a method for forming the same. A capacitor is arranged under a transistor such that the DRAM cell is suitable for high-density semiconductor devices. The semiconductor device according to the present invention comprises: a buried capacitor which consists of a storage electrode, a dielectric layer and a plate electrode, and which is formed on a substrate in planar form; and a transistor which is formed over the capacitor, the source/drain region of the transistor being connected to the storage electrode of the capacitor.
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申请公布号 |
DE4407532(A1) |
申请公布日期 |
1994.09.29 |
申请号 |
DE19944407532 |
申请日期 |
1994.03.07 |
申请人 |
GOLD STAR ELECTRON CO., LTD., CHUNGCHEONGBUK, KR |
发明人 |
CHOI, JONG MOO, CHUNGCHEONGBUK, KR |
分类号 |
H01L27/10;H01L21/8242;H01L27/108;H01L27/12;(IPC1-7):H01L27/108;H01L21/72 |
主分类号 |
H01L27/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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