APPARATUS AND SYSTEM FOR ARC ION PLATING,申请号WO1994JP00410-传众专利搜索

发明名称	APPARATUS AND SYSTEM FOR ARC ION PLATING
摘要	An apparatus for carrying out surface treatment of a workpiece using vacuum arc discharge. The apparatus can achieve an extremely high productivity by efficient handling of a workpiece. The apparatus comprises a rod-like evaporation source for generating arc, and workpieces so arranged as to surround the rod-like evaporation source in order to coat the workpieces with a film. The workpieces are movable relatively in the axial direction of the rod-like evaporation source.
申请公布号	WO9421839(A1)	申请公布日期	1994.09.29
申请号	WO1994JP00410	申请日期	1994.03.15
申请人	KABUSHIKI KAISHA KOBESEIKOSHO;HANAGURI, KOJI;TSUJI, KUNIHIKO;NOMURA, HOMARE;TAMAGAKI, HIROSHI;KAWAGUCHI, HIROSHI;SHIMOJIMA, KATSUHIKO;FUJII, HIROFUMI;KIDO, TOSHIYA;SUZUKI, TAKESHI;INOUE, YOICHI	发明人	HANAGURI, KOJI;TSUJI, KUNIHIKO;NOMURA, HOMARE;TAMAGAKI, HIROSHI;KAWAGUCHI, HIROSHI;SHIMOJIMA, KATSUHIKO;FUJII, HIROFUMI;KIDO, TOSHIYA;SUZUKI, TAKESHI;INOUE, YOICHI
分类号	C23C14/32;H01J37/32;H01L21/00;(IPC1-7):C23C14/32	主分类号	C23C14/32
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