发明名称 APPARATUS AND SYSTEM FOR ARC ION PLATING
摘要 <p>An apparatus for carrying out surface treatment of a workpiece using vacuum arc discharge. The apparatus can achieve an extremely high productivity by efficient handling of a workpiece. The apparatus comprises a rod-like evaporation source for generating arc, and workpieces so arranged as to surround the rod-like evaporation source in order to coat the workpieces with a film. The workpieces are movable relatively in the axial direction of the rod-like evaporation source.</p>
申请公布号 WO1994021839(P1) 申请公布日期 1994.09.29
申请号 JP1994000410 申请日期 1994.03.15
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