Vorrichtung und Verfahren zur Oberflächenreinigung.,申请号DE19916002311T-传众专利搜索

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发明名称	Vorrichtung und Verfahren zur Oberflächenreinigung.
摘要
申请公布号	DE69102311(T2)	申请公布日期	1994.09.29
申请号	DE19916002311T	申请日期	1991.03.05
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	WATANABE, MASAHIRO, ISOGO-KU, YOKOHAMA-SHI, JP;OTAKE, MITSUYOSHI, TOTSUKA-KU, YOKOHAMA-SHI, JP;HAMANO, MEGUMI HACHIMANYAMA APATO 126, TOTSUKA-KU, YOKOHAMA-SHI, JP;TAKIZAWA, YOSHIHARU, HITACHI-SHI, JP
分类号	B08B3/10;B08B3/06;B08B7/02;B24B31/00;H01L21/304;H05K3/26;(IPC1-7):B24B31/00	主分类号	B08B3/10
代理机构		代理人
主权项
地址

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