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发明名称
Herstellverfahren für ein Kontaktloch
摘要
申请公布号
DE4309611(A1)
申请公布日期
1994.09.29
申请号
DE19934309611
申请日期
1993.03.24
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
MELZNER, HANNO, DIPL.-PHYS., WAPPINGERS FALLS, N.Y., US
分类号
H01L21/3213;H01L21/60;H01L21/768;H01L23/522;(IPC1-7):H01L23/482;H01L23/535;H01L21/90;H01L27/108
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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