| 摘要 |
PURPOSE:To form a diamond thin film on the surface of a substrate with excellent adhesive strength by making a carbon material into a flying body with an electromagnetic accelerator such as an electromagnetic launcher and colliding the flying body with the substrate surface. CONSTITUTION:A couple of electromagnetic launchers 8 are arranged in the reaction chamber 6 of a diamond thin film depositing device 5, a carbonaceous flying body 9 of amorphous carbon, graphite, etc., is placed between the launchers, a water-cooled holder 10 having a surface vertical to the launcher 8 is arranged, and a substrate 11 consisting of sintered hard alloy, Si, SiC, a semiconductor of GaAs, etc., is fixed on the holder. The reaction chamber 6 is evacuated by an evacuating device 7, an inert gas such as He and Ar is introduced, a heavy current is applied to the launcher 8 by a power source I to launch the flying body 9 at a high speed from the launcher 8 by the Lorentz force generated by the strong magnetic flux generated in the launcher 8 and the current flowing in the flying body 9, and a diamond thin film is formed on the substrate 11 with excellent adhesive strength. |
